国内一级大片_久久久久亚洲国产av麻豆_屁屁影院ccyy国产第一页_欧美a视频在线观看_丁香六月激情_天天干天天av_久久久免费精品少妇高潮毛片_精品国产福利_老司机性色福利精品视频_日本高清三区_国产精品久久久亚洲女人的第一次_国产精品揄拍100视频_国产深夜在线观看_a毛看片免费观看视频_蜜桃成人无码区免费视频网站_国产亚洲精品a在线无码_亚洲无线观看国产高清_成人午夜视频精品一区_毛片一卡二卡_国产成人啪精品视频免费视频

熱門搜索: DJSF1352-RN-6DJSF1352-RN導軌式1500V雙路計量直流電能表 DJSF1352-RN-6DJSF1352-RN儲能用1500V直流電能表 安科瑞ADL400N-CT/D10ADL系列華為逆變器配套防逆流電表 AISD300-20K安科瑞AISD300系列三相智能安全配電裝置 ANAPF30-380安科瑞ANAPF有源電力濾波器 安科瑞ADL400N-CT/D10ADL系列導軌式防逆流電表 Acrel-1000DP分布式光伏監控系統 ADL200N-CT/D16儲能雙向計量電表 安科瑞DTSY1352-NK預付費三相電表 ASCP200-20D滅弧式電氣過載保護器 ARB6-A6低壓母線弧光保護解決方案 DJSF1352-RN雙向光伏組件發電計量電表 Acrel-3000WE電能實時監控管理系統 ARTM系列3路模擬量輸出溫度巡檢儀 安裝方便導軌式三相電監控裝置 ARTM系列嵌入式電力監控測溫裝置
產品分類

Cassification

技術文章/ Technical Articles

您的位置:首頁  /  技術文章  /  電壓暫降?諧波超標?半導體行業電能質量監測與治理解決方案

電壓暫降?諧波超標?半導體行業電能質量監測與治理解決方案

更新時間:2025-09-03      瀏覽次數:32

引言

電壓暫降?諧波超標?半導體行業電能質量監測與治理解決方案

01

半導體行業概述

電壓暫降?諧波超標?半導體行業電能質量監測與治理解決方案

電子廠房是全球范圍內的關鍵產業之一,為電子設備和技術提供核心基礎;電子廠房內的半導體等廠房相較于其他工業類廠房,主要特殊之處在于其潔凈等級要求高,光刻機、等離子注入機等精密設備的電源質量和電壓等級要求高;在生產中,穩定、可靠的電能質量對確保設備安全運行、提高產品質量和降低生產成本至關重要。

02

半導體行業負載分析

電壓暫降?諧波超標?半導體行業電能質量監測與治理解決方案

電力電子生產制造配電系統,主要負載為各類精密設備、照明及變頻通風設備、計算機及UPS等。其中大部分為非線性負載,低壓配電網諧波嚴重。

03

半導體行業特征

電壓暫降?諧波超標?半導體行業電能質量監測與治理解決方案

對電能質量要求高,電能質量是生產過程中至關重要的因素之一,直接影響產品質量和生產效率;負載中含有多種諧波源,配電諧波含量較高;諧波主要以6N±1次諧波為主。存在大量變頻設備,變頻設備之間存在相互諧振風險。

04

常見的電能質量問題

電壓暫降?諧波超標?半導體行業電能質量監測與治理解決方案

電壓波動和閃爍

不穩定的電壓水平會導致設備性能不穩定、產品質量下降。

電壓偏差

超過正常范圍的電壓峰值和谷值可能損壞設備,加快設備老化。

電流諧波

由于半導體設備的非線性特性,電流諧波可能導致設備故障和損壞。

電網干擾

如電網電壓波動、短時中斷等,可能導致設備停機、生產中斷。

電壓暫降?諧波超標?半導體行業電能質量監測與治理解決方案

安科瑞電能質量分析與治理方案

電壓暫降?諧波超標?半導體行業電能質量監測與治理解決方案

01

APView系列電能質量監測裝置

電壓暫降?諧波超標?半導體行業電能質量監測與治理解決方案

安科瑞APView500電能質量在線監測裝置采用了高性能多核平臺和嵌入式操作系統,遵照IEC61000-4-30《測試和測量技術-電能質量測量方法》中規定的各電能質量指標的測量方法進行測量,集諧波分析、波形采樣、電壓暫降/暫升/中斷、閃變監測、電壓不平衡度監測、事件記錄、測量控制等功能為一體。裝置在電能質量指標參數測量方法的標準化和指標參數的測量精度以及時鐘同步、事件告警功能等各個方面均達到了國家標準 A 級要求,能夠滿足110kV 及以下供電系統電能質量監測的要求,廣泛適用于化工、鋼鐵、冶金、醫院、數據中心、交通建筑等行業的電能質量監測。

電壓暫降?諧波超標?半導體行業電能質量監測與治理解決方案

APView500功能特點

  • 完整的穩態監測、暫態監測、瞬態監測

  • 故障錄波和事件記錄

  • 暫降源定位

  • 電壓暫降容忍度曲線與分析

  • PQDIF數據統計與導出

  • 電能質量日統計值

  • 電能質量水平評估報告

  • 電能質量符合性評估報告

  • 標記功能

  • Websever功能

  • 可自定義告警輸出

  • 國家機構A類認證、EMC認證

電壓暫降?諧波超標?半導體行業電能質量監測與治理解決方案

上圖設計

電壓暫降?諧波超標?半導體行業電能質量監測與治理解決方案


02

ANAPF有源諧波治理裝置

電壓暫降?諧波超標?半導體行業電能質量監測與治理解決方案

ANAPF系列有源電力濾波器并聯在含諧波負載的低壓配電系統中,能夠對動態變化的諧波電流進行快速實時的跟蹤和補償。

ANAPF系列有源電力濾波器通過CT采集系統諧波電流,經控制器快速計算并提取各次諧波電流的含量,產生諧波電流指令,通過功率執行器件產生與諧波電流幅值相等方向相反的補償電流,并注入電力系統中,從而抵消非線性負載所產生的諧波電流。

電壓暫降?諧波超標?半導體行業電能質量監測與治理解決方案
電壓暫降?諧波超標?半導體行業電能質量監測與治理解決方案
電壓暫降?諧波超標?半導體行業電能質量監測與治理解決方案

功能特點

  • DSP+FPGA控制方式,響應時間短,全數字控制算法,運行穩定;

  • 一機多能,兼補諧波無功,可對2~51次諧波進行全補償或指定特定次諧波進行償;

  • 具有完善的橋臂過流保護、直流過壓保護、裝置過溫保護功能;

  • 模塊化設計,體積小,安裝便利,方便擴容;

  • 采用7英寸大屏幕彩色觸摸屏以實現參數設置和控制,使用方便,易于操作和維護;

  • 多機并聯,達到較高的電流輸出等級;

03

ANSVG-G-A濾波補償裝置

電壓暫降?諧波超標?半導體行業電能質量監測與治理解決方案

混合動態濾波補償裝置是一種用于動態補償無功的新型電力電子裝置。其基本原理是指將三相橋式電路通過電抗器直接并聯在電網上,適當地調節橋式電路交流側輸出電壓的相位和幅值或者直接控制其交流側電流,就可以使該電路吸收或者發出滿足要求的無功電流,實現動態無功補償的目的,同時這個模塊可以在容量滿足的情況下補償多次諧波。

電壓暫降?諧波超標?半導體行業電能質量監測與治理解決方案
電壓暫降?諧波超標?半導體行業電能質量監測與治理解決方案
電壓暫降?諧波超標?半導體行業電能質量監測與治理解決方案

功能特點

  • 線性輸出,無功功率全容性-全感性輸出的同時,可濾除5、7、11、13次以內的諧波;

  • 具備三相不平衡治理及穩壓功能,提高0.4kV配電安全性;

  • 補償后系統功率因數≥0.99;

  • 采用進口IGBT,功率密度大,可靠性高;

  • 采用DSP高速檢測和運算的數字控制系統;

  • 監控以及顯示具備遠程通訊接口,可以通過PC機實時監控;

  • 模塊化并聯設計,故障模塊不影響正常模塊的運行,可靠性高。

上圖設計

電壓暫降?諧波超標?半導體行業電能質量監測與治理解決方案

04

Acrel-EMS系統解決方案

電壓暫降?諧波超標?半導體行業電能質量監測與治理解決方案

在電子廠房產業園區內的源、網、荷、儲、充的各個關鍵節點安裝安科瑞自主研發的各類監測、分析、保護、治理裝置;通過先進的控制、計量、通信等技術,將分布式電源、儲能系統、可控負荷、電動汽車、電能路由器聚合在一起;平臺根據最新的電網價格、用電負荷、電網調度指令等情況,靈活調整微電網控制策略并下發給儲能、充電樁、電能路由器等系統,保證企業微電網始終高效、穩定運行。

電壓暫降?諧波超標?半導體行業電能質量監測與治理解決方案

平臺功能-電力監控

  • 實時監測高低壓配電柜的電壓、電流、功率等電力參數,實現遙測、遙信、遙控、遙調。

  • 實時監測各配電室溫濕度、煙感、門磁、水浸、有害氣體等環境參數,有害氣體超標聯動排風系統。

  • 實時監測關鍵供配電設備運行情況,如變壓器、無功補償柜、柴油發電機、UPS、直流屏等。

電壓暫降?諧波超標?半導體行業電能質量監測與治理解決方案
電壓暫降?諧波超標?半導體行業電能質量監測與治理解決方案


電壓暫降?諧波超標?半導體行業電能質量監測與治理解決方案
電壓暫降?諧波超標?半導體行業電能質量監測與治理解決方案

平臺功能-電能質量

  • 監測各進線回路電能質量,包括電壓暫降、暫態、穩態、諧波畸變等數據波形記錄,進而判斷配電系統擾動方向,生成電能質量分析報告。

  • 有源濾波裝置和無功補償裝置對0.4kV側電能質量進行補償和治理,系統實時監測有源濾波裝置和無功補償裝置運行情況,確保電能質量符合生產要求。

電壓暫降?諧波超標?半導體行業電能質量監測與治理解決方案
電壓暫降?諧波超標?半導體行業電能質量監測與治理解決方案


電壓暫降?諧波超標?半導體行業電能質量監測與治理解決方案
電壓暫降?諧波超標?半導體行業電能質量監測與治理解決方案


安科瑞產品體系

 

電壓暫降?諧波超標?半導體行業電能質量監測與治理解決方案

 

 

 

微信掃一掃

郵箱:panli@email.acrel.cn

傳真:

地址:江蘇省江陰市南閘東盟路5號

Copyright © 2025 江蘇安科瑞微電網研究院有限公司版權所有   備案號:蘇ICP備20029731號-4   技術支持:智能制造網
主站蜘蛛池模板: | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | | |